X-ray-induced Cu deposition and patterning on insulators at room temperature

AUTHORS: Hsu PC, Chen YS, Hwu YK, Je JH, Margaritondo G, Tok ES

Journal of Synchrotron Radiation, 22(6): 1524-7, November 2015

ABSTRACT

X-ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO2/Si and photoresists like PMMA and SU-8. The process is suitable for patterning and the products can be used as seeds for electroplating of thicker overlayers.

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Module: PC