AUTHORS: Chen TY, Chen YT, Wang CL, Kempson IM, Lee WK, Chu YS, Hwu Y, Margaritondo G

Optics Express, 19(21): 19919-24, October 2011

ABSTRACT

Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition.

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